Digital Liquid Mass Flow Meter - Model D2000iM

D2000iM Product Highlights:
  • < 1 second Response Time
  • Piezoelectric Control Valve
  • Compact Size
  • ±1% of Reading Accuracy
  • Metal Seal Construction
  • 1/8” Face Seal or Compression Fitting
The Parker D2000i Series liquid mass flow controller is designed to address the need for fast, precise control of liquid precursors in semiconductor manufacturing processes. Closed-loop digital control circuitry, combined with the integral proportional piezoelectric-actuated control valve, offer response times of less than one (1) second and stable control at low flows. Clean room assembly and all metal seal construction ensure high purity and leak integrity. A unique laminar bypass and sensor assembly provide accurate measurement with only a 5°C rise in fluid temperature. The compact package size of the D2000i Series simplifies system integration. A D2000i Series Liquid Mass Flowmeter is available for applications requiring flow monitoring only.


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D2000i Series: Mass Flow Controller

Fast Response Liquid Flow Controller
The Parker D2000i Series Liquid Mass Flow Controller is designed to address the need for fast, precise control of liquid precursors in semiconductor manufacturing processes. Closed-loop digital control circuitry, combined with an integral piezoelectric-actuated proportional control valve, offer response times of less than one second and stable control at low flows. A unique laminar bypass and sensor assembly provide accurate measurement with only a 5°C rise in fluid temperature.

Clean room assembly and all metal seal construction ensure high purity and leak integrity. The compact package size of the D2000i Series simplifies system integration.


A D2000i Series Liquid Mass Flowmeter is available for applications requiring flow monitoring only.

Product Features
• < 1 second Response Time
• Piezoelectric Control Valve
• Compact Size
• ±1% of Reading Accuracy
• Metal Seal Construction
• 1/8” Face Seal or Compression Fitting

SPECIFICATIONS
Response Time
<1 second to within 5% of rate (up to 6 stored valve jump voltages)
Accuracy and Linearity
± 1% of reading
Repeatability
<±0.2% of rate at any constant temperature within operating temperature range
Rangeability (Control Range)
20:1 (5%-100% full scale) (accuracy & control)
Ambient and Operating Temperature Range
-10 to 40°C (+14 to 104°F)
Maximum Allowable Operating Pressure
125 psig
Temperature Coefficient
< 0.1%/°C
Setpoint Input/Flow Signal Output
0-5 Vdc ( 2k ohm minimum load resistance for flow output signal)
Power Supply Requirements
(Current Consumption < 200 mAdc):+15 (±10%) Vdc
Leak Integrity
1 x 10-9 atm. cc/sec.He


Warm-up Time

20 minutes
Materials of Construction- (wetted surfaces)
Body – 316L stainless steel
Sensor Assembly – 316L stainless steel
Valve Components – 316L stainless steel
O-rings – 316L stainless steel
Control Valve
Normally open piezoelectric-actuated
External Electrical Connector
Nine (9)-pin D-connector
Process Connections
1/8” male metal gasket face seal or 1/8” compression fitting
Internal Volume
< 1 ml
Mounting Orientation
Horizontal (±5°)
Weight
<1.5 lbs.

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