Digital Gas Flow Controller - Model 604A

604A Parker Digital Series 600 mass flowmeters handle flow rates and operating pressures identical to those of the 200 Series MFCs. The Digital Series 600 MFCs feature better accuracy & repeatability than analog MFCs, performance-enhancing digital electronics, multi-gas capability & self-diagnostics.


Request additional info or a quote.
Get Info or a Quote

Series 500 & 600 Gas Mass Flow Instruments

Digital Electronics Gives High Accuracy with Enhanced Performance
Parker Series 500 Mass Flowmeters (MFM’s) and Series 600 Mass Flow Controllers (MFC’s) accurately measure and control (Series 600 only) flow rates of a wide variety of gases from 5 standard cubic centimeters per minute (SCCM) to 1000 standard liters per minute (SLPM) full scale nitrogen flow for operating pressures up to 3000 PSIG.

Series 500 MFM’s and Series 600 MFC’s feature performance-enhancing digital electronics, improved accuracy and repeatability, multi-gas capability and self diagnostics. Both Series 500 and Series 600 are available with your choice of traditional analog inputs and outputs, an RS232 connection, Modbus, Profibus or DeviceNet digital protocol.

Product Features
• Digital Electronics
• Percentage of Reading Accuracy & Repeatability
• Multi-Gas Capability
• Analog I/O, RS232, Modbus, Profibus DP or DeviceNet Protocol
• Self-Diagnostics
• LED Operation Indicators
• Operating Pressures to 3000 PSIG
• Alarm and Counter Functions
• Remotely Adjustable Control Settings
• Single Power Supply Operation

AVAILABLE MODELS

Note: The flow ranges listed are the minimum and maximum nitrogen (N2) flow ranges available for each given model. Intermediate flow ranges are available. For correct sizing when operating parameters are questionable, please consult the factory.

Mass Flowmeters:
Mass Flow Controllers:
Model 511: 0-5 SCCM to 0-10 SLPM N2
Model 512: 0-10 SLPM to 0-100 SLPM N2
Model 513: 0-100 SLPM to 0-500 SLPM N2
Model 514: 0-500 SLPM to 0-1000 SLPM N2
Model 521: 0-5 SCCM to 0-10 SLPM N2
Model 522: 0-10 SLPM to 0-100 SLPM N2
Model 523: 0-100 SLPM to 0-500 SLPM N2
Model 601: 0-5 SCCM to 0-10 SLPM N2
Model 651: 0-10 SLPM to 0-50 SLPM N2
Model 602: 0-10 SLPM to 0-100 SLPM N2
Model 602A: 0-10 SLPM to 0-100 SLPM N2
Model 603A: 0-100 SLPM to 0-500 SLPM N2
Model 604A: 0-500 SLPM to 0-1000 SLPM N2
Model 621: 0-5 SCCM to 0-10 SLPM N2
Model 622: 0-10 SLPM to 0-100 SLPM N2

SPECIFICATIONS
Flow Capacity
Any flow range from 0-5 SCCM to 0-1000 SLPM (nitrogen equivalent).
Note: The flow ranges listed are the minimum and maximum nitrogen (N2) flow ranges available. Intermediate flow ranges are available. For correct sizing when operating parameters are questionable, please consult the factory.
Response Time (per SEMI E17-91 Settling Time)
1 to 2 seconds
Accuracy and Linearity
±1.0% of reading (20%-100% full scale), ±0.8% of reading plus ±0.2% full scale (below 20% full scale)
Repeatability
Within ±0.2% of rate at any constant temperature within operating temperature range
Rangeability (Control Range)
50:1 (2%-100% full scale) (accuracy and control)
Ambient and Operating Temperature Range
-10 to 70ºC (+14 to 158ºF)
Maximum Operating Pressure
1500 PSIG (Models 511, 512, 513 & 514)
1000 PSIG (Models 601, 602 & 651)
200 PSIG (Models 602A, 603A & 604A)
3000 PSIG (Models 521, 522, 523, 621 & 622)
Temperature Coefficient (per SEMI E18-91 Zero Effect and Span Effect)
±0.05% full scale/ºC of zero ±0.05% of reading/ºC of span


Pressure Coefficient (per SEMI E28-92 Total Calibration Effect)

± 0.1%/atmosphere typical using nitrogen (N2)
Mounting Orientation
Attitude insensitive
Warm-up Time
10 minutes
External Electrical Connector
Nine (9)-pin D-connector (all units); RJ45 Modbus connector (units supplied with Modbus protocol)
Setpoint Input/Flow Signal Output

Setpoint Flow Signal
0-5 Vdc 0-5 Vdc (2K ohm minimum load resistance)
0-10 Vdc 0-10 Vdc (3K ohm minimum load resistance)
4-20 mAdc 4-20 mAdc (sourcing) (refer to load resistance values below)
0-100% (Modbus, Profibus DP, DeviceNet) 0-100% (Modbus, Profibus DP, DeviceNet)

Load resistance values for 4-20 mAdc flow signal output
200-750 ohm for 15-30 Vdc loop supply voltage
Power Supply Requirements (Current Consumption <250 mAdc)
All models operate from nominal power supply voltages of +15 or +24 Vdc

MATERIALS OF CONSTRUCTION
Body
316 Stainless Steel
Sensor Assembly
316L Stainless Steel
Orifice (MFC’s only)
316 Stainless Steel
Valve Components (Wetted) (MFC’s only)
302 Stainless Steel, 316 Stainless Steel, 430F Stainless Steel and Sandvik® 1802
Elastomers
Buna N, EPDM,Kalrez®, Neoprene or Viton®
Process Connections
316 Stainless Steel


Sandvik® - AB Sandvik Materials Technology
Kalrez®, Viton® - DuPont Dow Elastomers L.L.C.
Specifications subject to change

ORDERING INFORMATION
To order, please specify
• Model number
• Type of output signal
• Elastomer material
• Process connection size & type
• Flow capacity
• Gas type
• Operating temperature
• Inlet (supply) pressure
• Outlet pressure (not required for MFM’s)
• Calibration standard (i.e. 0°C, 20°C, 21.1°C or 25°C)
• Additional accessories required

Download the complete PDF for more details and ordering information

Request info or a quote on this product

Request Information

Get prompt assistance on a Parker flow product or application challenge.

Get A Quote

Need pricing on a specific or custom Parker Instrument?

Locate A Representative

Use our Rep Locator to find the appropriate representative for your area.
We'd love to share this file with you, but first you need to log in or register for an account.

Email:
 
First Name:
Last Name:
Email:
Phone:
Company:
Title:
 
Porter Instrument Division respects your privacy, and does not share information with third party companies. View website policies and contact information.