Model 601CM Series II Mass Flow Controller

601CM Product Highlights:
  • Full Scale Flow Ranges from 0.2 to 10 SCCM up to 1 to 50 SLPM
  • Operating Pressures up to 1000 PSIG
  • High accuracy and repeatability
  • Storage of max. 8 calibration curves
  • User configurable control characteristics
  • Flow Parameter Adjust functionality up to 150 PSIA
  • Effective Rangeability <150:1
  • Analog or digital: RS232, DeviceNet™, EtherCAT®, ProfibusDP®, Modbus-RTU
Parker’s Model 601CM Series II Mass Flow Controller (MFC) is designed to meet the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. Metal Sealed MFCs have flow ranges starting from 0.2 to 10 SCCM up to 1 to 50 SLPM.

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Specifications

Measurement/Control System
Accuracy (incl. linearity)
(based on actual calibration) 
Standard:±0.5% Reading plus ±0.1%Full Scale
Turndown 1:50 (in digital mode up to 1:150)
Repeatability <0.2% Reading
Settling Time (Controller) 1 second typical above 5% full scale; option: down to 600 msec
Control Stability <±0.05% Full Scale (typical for 1 slm N2)
Operating Temperature 50 to +70°C on request
Temperature Sensitivity Zero: <0.05% Full Scale/°C; span: <0.05% Reading/°C
Pressure Sensitivity 0.1%/ATM typical N2; 0.01%/ATM typical H2
Leak Integrity, outboard Tested <2 x 10-9 mbar l/s He
Attitude Sensitivity Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2
Warm-Up Time 30 min. for optimum accuracy; 2 min. for accuracy ±2% Full Scale

Mechanical Parts
Material (wetted parts) Stainless Steel 316L or equivalent
Surface Quality (wetted parts) Ra=0.8µm typical
Process Connections Face seal fittings
Seals Standard: Viton; Options: EPDM, Kalrez (FFKM)
Ingress Protection (housing) IP40

Electrical Properties
Power Supply +15-24Vdc
Power Consumption Meter: 70 mA; Controller: max. 320 mA; Add 50 mA for Profibus, if applicable
Analog Output/Command 0-5 (10) Vdc or 0 (4)-20 mA - specify - (Sourcing output)
Digital Communication Standard: RS232; Options: Profibus-DP®, DeviceNet™, EtherCAT®, Modbus

Electrical Connection
Analog/RS232 9-pin D-connector (male)
Profibus-DP® Bus: 9-pin D-connector (female); Power: 9-pin D-connector (male)
DeviceNet™ 5-pin M12-connector (male)
EtherCAT® 2 x RJ45 modular jack (in/out)
Modbus-RTU/FLOW-BUS RJ45 modular jack


Technical specifications and dimensions subject to change without notice.

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