511AC Series II Mass Flow Meter

511AC Series II Mass Flow Meter Product Highlights:
  • Full Scale Flow Ranges from 20 l/min to 100 l/min
  • Operating Pressures up to 1500 PSIA
  • High accuracy and repeatability
  • Storage of max. 8 calibration curves
  • User configurable control characteristics
  • Flow Parameter Adjust functionality up to 150 PSIA
  • Effective rangeability < 180:1
  • Analog or digital: RS232, DeviceNet™, EtherCAT®, Profibus-DP®, Modbus-RTU
Parker Model 511AC Series II Mass Flow Meter is designed for precise measurement of virtually all conventional process gases. The 511AC consists of a thermal mass flow sensor, and microprocessor based circuitry with signal and fieldbus conversion. The mass flow rate is provided as analog signal or digitally via RS232 or various fieldbus options. Each unit is specifically sized and calibrated depending on the type of gas and the process conditions of the application.

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State of the Art Digital Design

Parker's Series II Mass Flow products are equipped with a microprocessor based digital pc-board offering high accuracy, excellent temperature stability and fast MFC response time. The basic digital pc-board contains all of the general functions needed for measurement and control. RS232 communication and analog I/O are included. An optional integrated communication interface board provides DeviceNet™, Profibus-DP®, or Modbus-RTU.

Models and Flow Ranges

Model Minimum Nominal Maximum
511AC - Q 0.4 to 20 l/min 0.4 to 50 l/min 0.4 to 75 l/min
511AC - R 0.6 to 30 l/min 0.6 to 70 l/min 0.4 to 100 l/min

All flow ranges are at standard conditions of 14.7 PSIA and 70°F (21.1°C)


Measurement/Control System
Accuracy (incl. linearity)
(based on actual calibration) 
Standard:±0.5% Reading plus ±0.1%Full Scale 
Turndown 1:50 (in digital mode up to 1:187.5)
Repeatability <0.2% Reading
Operating Temperature -10 to +70°C
Temperature Sensitivity Zero: <0.05% Full Scale/°C; span: <0.05% Reading/°C
Pressure Sensitivity 0.1%/ATM typical N2; 0.01%/ATM typical H2
Leak Integrity, outboard Tested <2 x 10-9 mbar l/s He
Attitude Sensitivity Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2
Warm-Up Time 30 min. for optimum accuracy; 2 min. for accuracy ±2% Full Scale

Mechanical Parts
Material (wetted parts) Stainless Steel 316L or equivalent
Surface Quality (wetted parts) RA=0.8µm typical
Process Connections Compression or face seal fittings
Seals Standard: Viton; Options: EPDM, Kalrez (FFKM)
Ingress Protection (housing) IP40

Electrical Properties
Power Supply +15-24Vdc
Power Consumption Meter: 70 mA; Controller: max. 320 mA; Add 50 mA for Profibus, if applicable
Analog Output/Command 0-5 (10) Vdc or 0 (4)-20 mA - specify - (Sourcing output)
Digital Communication Standard: RS232; Options: Profibus-DP®, DeviceNet™, EtherCAT®, Modbus

Electrical Connection
Analog/RS232 9-pin D-connector (male)
Profibus-DP® Bus: 9-pin D-connector (female); Power: 9-pin D-connector (male)
DeviceNet™ 5-pin M12-connector (male)
EtherCAT® 2 x RJ45 modular jack (in/out)
Modbus-RTU/FLOW-BUS RJ45 modular jack

Technical specifications and dimensions subject to change without notice.

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