Analog Gas Mass Flow Meter - Model 111

111 Parker 100 Series mass flowmeters (MFMs) accurately measure flow rates of a wide variety of gases from 5 SCCM to 1000 SLPM full scale nitrogen flow for operating pressures up to 3000 PSIG. The MFMs provide a linear flow signal output proportional to a calibrated flow rate.


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Model 111: Mass Flow Instruments

Parker Mass Flow products reflect over four decades of experience in the design and manufacture of precision instruments for the measurement and control of gas flow. They incorporate design principles that are simple and straightforward, yet flexible enough to operate under a wide variety of process parameters. The result is flowmeters, flow controllers and control valves that are accurate, reliable and cost-effective solutions for many gas flow applications in the analytical, process, chemical/petrochemical, environmental, biopharmaceutical and research markets.

The 100 and 200 series are the lastest evolution of the original Parker Analog Mass Flow Products. With thousands installed worldwide, they are the proven solution when cost effective high performance gas flow control is the goal. The 100 Series Mass Flow Meters are available for applications where flow measurement only is required.

AVAILABLE MODELS

Note: The flow ranges listed are the minimum and maximum nitrogen (N2) flow ranges available for each given model. Intermediate flow ranges are available. For correct sizing when operating parameters are questionable, please consult the factory.

Type Model  Max. Flow1
(SLPM)
Max. Pressure2
(PSIG)
Min. Delta3
(PSIG)
Analog
Flow
Meters
111
121
112
122
113
114
2111
3211
10
10
100
100
500
1000
10
10
1500
3000
1500
3000
1000
1000
200
1000
2
2
2
2
2
2
2
2
Type Model Max. Flow1
(SLPM)
Max Pressure2
(PSIG)
Min. Delta3
(PSIG)
Analog
Flow
Controllers
201
261
221
251
202
222
202A
203A
204A
2201
3201/3261
10
10
10
50
100
100
100
500
1000
10
10
1000
1000
3000
1000
1000
3000
200
200
200
200
1000
7
7
7
35
60
60
10
40
80
7
7

SPECIFICATIONS
Flow Capacity
Any Flow range from 0-5 SCCM to 0-10 SLPM (nitrogen equivalent).
Response Time (per SEMI E17-91 Settling Time)
1 to 2 Seconds
Accuracy and Linearity
±1% full scale
Repeatability
Within ±0.2% full scale at any constant temperature within operating temperature range
Rangeability (Control Range)
50; 1 (2%-100% full scale) (accuracy and control)
Ambient and Operating Temperature Range
-10 to 70 °C ( ±14 to 158 °F)
Maximum Operating Pressure
1500 PSIG
Temperature Coefficent (per SEMI E18-91 Zero Effect and Span Effect)
±0.05% full scale / °C of zero ±0.05% of reading/ °C of span
Pressure Coefficent (per SEMI E28-92 Total Calibration Effect)
± 0.1% / atmosphere typical using nitrogen (N2)


Mounting Orientation
Attitude insensitive
Warm-up Time
10 minutes
External Electrical Connector
Nine (9)- pin D-connector
Weight (approximate)
0.9 lbs
Power Supply Requirements
(Current consumption <45 mAdc): Voltage output models: +12 (±5%) (0-5 Vdc & 1-5 Vdc flow signal outputs only) or +15 (±10%) Vdc
Current loop models: +15 (±5%) or +24 (±15%) Vdc
Setpoint Input/Flow Signal Output
0-5 Vdc / 0-5 Vdc (2K ohm minimum load resistance)
0-10 Vdc / 0-10 Vdc (3K ohm minimum load resistance)
1-5 Vdc / 1-5 Vdc (2K ohm minimum load resistance)
4-20 mAdc / 4-20mAdc (refer to load resistance values below)
Load resistance values for 4-20 mAsc flow signal output
0-450 ohm for 6.5-15 Vdc loop supply voltage
200-750 ohm for 15-30 Vdc loop supply voltage

MATERIALS OF CONSTRUCTION
Body
316 Stainless Steel
Sensor Assembly
316L Stainless Steel
Elastomers (O-rings and Valve Seat)
Buna N, EPDM, Kalrez®, Neoprene or Viton®
Process Connections
316 Stainless Steel

Kalrez®, Viton® - DuPont Dow Elastomers L.L.C.
Specifications subject to change

ORDERING INFORMATION
To order, please specify
• Model number
• Type of output signal
• Elastomer material
• Process connection size & type
• Flow capacity
• Gas type
• Operating temperature
• Inlet (supply) pressure
• Outlet pressure
• Calibration standard (i.e. 0°C, 20°C, 21.1°C or 25°C)
• Additional accessories required

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