Mass Flow Controllers: Gas Mass, Liquid Mass & Valves

Mass Flow Controllers

PORTER mass flow products reflect over three decades of experience in the design and manufacture of precision instruments for the measurement and control of gas flow. They incorporate design principles that are simple and straightforward, yet flexible enough to operate under a wide variety of process parameters. Porter's Mass Flow Controllers are accurate, reliable, cost effective solutions to your mass flow application needs.

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Gas Flow Controllers
Liquid Flow Controllers
Flow Control Valves
Accessories

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DIGITAL

Note: The flow ranges listed are the minimum and maximum nitrogen (N2) flow ranges available for each given model. Intermediate flow ranges are available. For correct sizing when operating parameters are questionable, please consult factory.

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 601 More Info	+/- 1%/Reading (20%-100% Full Scale)	0-5 SCCM to 0-10 SLPM N2	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 651 More Info	+/- 1%/Reading (20%-100% Full Scale)	0-10 SLPM to 0-50 SLPM N2	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 602 More Info	+/- 1%/Reading (20%-100% Full Scale)	0-10 SLPM to 0-100 SLPM N2	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 602A More Info	+/- 1%/Reading (20%-100% Full Scale)	0-10 SLPM to 100 SLPM N2	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 603A More Info	+/- 1%/Reading (20%-100% Full Scale)	0-100 SLPM to 0-500 SLPM N2	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 604A More Info	+/- 1%/Reading (20%-100% Full Scale)	0-500 SLPM to 0-1000 SLPM N2	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 621 More Info	+/- 1%/Reading (20%-100% Full Scale)	0-5 SCCM to 0-10 SLPM N2	N/A	3000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 622 More Info	+/- 1%/Reading (20%-100% Full Scale)	0-10 SLPM to 0-100 SLPM N2	N/A	3000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ANALOG

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 201 More Info	+/- 1% Full Scale	0-5 SCCM to 0-10 SLPM	N/A	1000PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 251 More Info	+/-1% Full Scale	0-10 SLPM to 0-50 SLPM	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 202 More Info	+/- 1% Full Scale	0-10 SLPM to 0-100 SLPM	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 202A More Info	+/- 1% Full Scale	0-5 SCCM to 0-10 SLPM	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 203A More Info	+/- 1% Full Scale	0-100 SLPM to 0-500 SLPM	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 204A More Info	+/- 1.5% Full Scale	0-500 SLPM to 0-1000 SLPM	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 2201 More Info	+/- 2% Full Scale	0-10 SLPM	N/A	200 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 221 More Info	+/- 1% Full Scale	Please consult factory	N/A	3000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 222 More Info	+/- 1% Full Scale	0-10 SLPM to 0-100 SLPM	N/A	3000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

SEVERE DUTY

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 3600 More Info	±1.0% of reading (20%-100% full scale)	Model 3601: 10 SLPM Model 3602: 100 SLPM (nitrogen equivalent)	N/A	1500 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

PANEL MOUNT

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model MPC More Info	+/- Full Scale	.5, 2,5, 20 SLPM	N/A	75 PSIG	I/O: Keypad, 0-5 Vdc

UL CI DIV II

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 3201 More Info	+/- 1% Full Scale	5 SCCM to 10 SLPM	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 3261 More Info	+/- 1% Full Scale	0-10 SLPM	N/A	1000 PSIG	I/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

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DIGITAL

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model D2000i More Info	+/- 1%/Reading (5%-100% Full Scale)	13 mL/min IPA	N/A	125 PSIG	I/O: 0-5 Vdc

ANALOG

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PROPORTIONAL SOLENOID

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 001 More Info	N/A	0-10 SLPM	N/A	1000 PSIG	I/O: 12 vDC closed loop

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 002 More Info	N/A	0-100 SLPM	N/A	1000 PSIG	I/O: 12 vDC closed loop

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model 003A More Info	Accuracy	0-500 SLPM	Maximum Controlled Pressure Range	200 PSIG	I/O: 12 Vdc Closed Loop

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4 CHANNEL CONTROL MODULES

Model	Accuracy	Flow Range	Pressure Range	Max Pressure	I/O
Model CM-400 More Info	N/A	N/A	N/A	N/A	I/O: N/A