Mass Flow Controllers

Parker mass flow controller products reflect over three decades of experience in the design and manufacture of precision instruments for thermal mass flow measurement and control of gas flow. These controllers incorporate design principles that are simple and straightforward, yet flexible enough to operate under a wide variety of process parameters. Parker's Mass Flow Controllers are accurate, reliable, cost effective solutions to your mass flow application needs.

Take a look at the remarkable features the new Series II mass flow instruments offer.

Need a custom flow or pressure solution? Send us your specs here!

SERIES II DIGITAL GAS MFCs

Series II is loaded with powerful LabView tools. Download the Series II Software Bulletin.

ModelAccuracyFlow RangeMax PressureI/O
600CV Series II Mass Flow Controller
Model 600CV
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
0.7 ml/min to 9 ml/min
960 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
601CV Series II Mass Flow Controller
Model 601CV
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
8 ml/min to 25 l/min
928 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
601AV Series II Mass Flow Controller
Model 601AV
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
20 l/min to 100 l/min
960 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
602AV Series II Mass Flow Controller
Model 602AV
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
40 l/min to 250 l/min
928 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
603AV Series II Mass Flow Controller
Model 603AV
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
200 l/min to 1670 l/min
928 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
601CM
Model 601CM
More Info
+/-0.5% Reading plus +/-0.1% Full Scale
0.2 cc/min to 50 l/min
1000 PSIGAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
601CB
Model 601CB
More Info
±1.0% full scale
0.4 to 70 l/min
145 PSIG0-5 (10) Vdc or 0 (4)-20 mA; RS232 or Modbus-RTU

ModelAccuracyFlow RangeMax PressureI/O
613AV
Model 613AV
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
200 to 1670 ml/min
Up to 1450 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)


SERIES I GAS MFCs

ModelAccuracyFlow RangePressure RangeMax PressureI/O
601
Model 601
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-5 SCCM to 0-10 SLPM N2
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
602
Model 602
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-10 SLPM to 0-100 SLPM N2
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
602A
Model 602A
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-10 SLPM to 0-100 SLPM N2
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
603A
Model 603A
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-100 SLPM to 0-500 SLPM N2
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
604A
Model 604A
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-500 SLPM to 0-1000 SLPM N2
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
651
Model 651
More Info
±1.0% of reading (20%-100% full scale)
0-10 SLPM to 0-50 SLPM N2
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus DP, DeviceNet


CLASSIC GAS MFCs

Note: The flow ranges listed are the minimum and maximum nitrogen (N2) flow ranges available for each given model. Intermediate flow ranges are available. For correct sizing when operating parameters are questionable, please consult factory.

ModelAccuracyFlow RangePressure RangeMax PressureI/O
201
Model 201
More Info
+/- 1% Full Scale
0-5 SCCM to 0-10 SLPM
N/A 1000PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
202
Model 202
More Info
+/- 1% Full Scale
0-10 SLPM to 0-100 SLPM
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
202A
Model 202A
More Info
+/- 1% Full Scale
0-5 SCCM to 0-10 SLPM
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
203A
Model 203A
More Info
+/- 1% Full Scale
0-100 SLPM to 0-500 SLPM
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
204A
Model 204A
More Info
+/- 1.5% Full Scale
0-500 SLPM to 0-1000 SLPM
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
251
Model 251
More Info
+/-1% Full Scale
0-10 SLPM to 0-50 SLPM
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
261
Model 261
More Info
+/-1% Full Scale
0-5 SCCM to 0-10 SLPM
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
2201
Model 2201
More Info
+/- 2% Full Scale
0-10 SLPM
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc


SEVERE DUTY GAS MFCs

ModelMax Flow (SLPM)Max Pressure (PSIG)Min Delta (PSIG)
3600
Model 3600
More Info
Model 3601: 10 SLPM
Model 3602: 100 SLPM (nitrogen equivalent)
1500 PSIG N/A


LIQUID MFCs

ModelAccuracyFlow RangeMax PressureI/O
D2000i
Model D2000i
More Info
+/- 1%/Reading (5%-100% Full Scale)
13 mL/min IPA
125 PSIGI/O: 0-5 Vdc


PROPORTIONAL FLOW CONTROL VALVES

ModelMax Flow (SLPM)Max Pressure (PSIG)
001
Model 001
More Info
0-10 SLPM
1000 PSIG

ModelMax Flow (SLPM)Max Pressure (PSIG)
002
Model 002
More Info
0-100 SLPM
1000 PSIG

ModelMax Flow (SLPM)Max Pressure (PSIG)
003A
Model 003A
More Info
0-500 SLPM
200 PSIG


ACCESSORIES

ModelAccuracyFlow RangePressure RangeMax PressureI/O
CM-400
Model CM-400
More Info
N/A
N/A
N/A N/AI/O: N/A


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