Mass Flow Meters

Parker mass flow Products reflect over four decades of experience in the design and manufacture of precision instruments for the measurement of gas flow. They incorporate design principles that are simple and straightforward, yet flexible enough to operate under a wide variety of process parameters. Parker's Mass Flow Meters are accurate, reliable, cost effective solutions to your mass flow application needs.

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Take a look at the remarkable features the new Series II mass flow instruments offer.

SERIES II DIGITAL GAS MFMs

Series II is loaded with powerful LabView tools. Download the Series II Software Bulletin.

ModelAccuracyFlow RangeMax PressureI/O
510C Series II MFM Model
Model 510C
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
0.7 ml/min to 9 ml/min
1450 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
511B Series II MFM Model
Model 511B
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
8 ml/min to 25 l/min
1450 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
511AC Series II Mass Flow Meter
Model 511AC
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
20 l/min to 100 l/min
1450 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
512AC Series II Mass Flow Meter
Model 512AC
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
40 l/min to 250 l/min
1450 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)

ModelAccuracyFlow RangeMax PressureI/O
513AC Series II Mass Flow Meter
Model 513AC
More Info
Standard: ±0.5% Reading plus ±0.1% Full Scale
200 l/min to 1670 l/min
1450 PSIAAnalog: (0-5 Vdc, 0-10 Vdc, 4-20 mAdc)
Digital: (RS232, DeviceNet™, EtherCAT®, Profibus®, Modbus-RTU)


SERIES I GAS MFMs

ModelAccuracyFlow RangePressure RangeMax PressureI/O
511
Model 511
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-5 SCCM to 0-10 SLPM N2
N/A 1500 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
512
Model 512
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-10 SLPM to 0-100 SLPM N2
1500 PSIG 1500 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
513
Model 513
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-100 SLPM to 0-500 SLPM N2
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet

ModelAccuracyFlow RangePressure RangeMax PressureI/O
514
Model 514
More Info
+/- 1%/Reading (20%-100% Full Scale)
0-500 SLPM to 0-1000 SLPM N2
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc, Modbus, Profibus, DeviceNet


CLASSIC GAS MFMs

Note: The flow ranges listed are the minimum and maximum nitrogen (N2) flow ranges available for each given model. Intermediate flow ranges are available. For correct sizing when operating parameters are questionable, please consult factory.

ModelAccuracyFlow RangePressure RangeMax PressureI/O
111
Model 111
More Info
+/- 1% Full Scale
0-5 SCCM to 0-10 SLPM
N/A 1500 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
112
Model 112
More Info
+/- 1% Full Scale
0-10 SLPM to 0-100 SLPM
N/A 1500 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
113
Model 113
More Info
+/- 1% Full Scale
0-100 SLPM to 0-500 SLPM
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
114
Model 114
More Info
+/- 1.5% Full Scale
0-500 SLPM to 0-1000 SLPM
N/A 1000 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc

ModelAccuracyFlow RangePressure RangeMax PressureI/O
2211
Model 2211
More Info
+/- 1% Full Scale
40 SCCM to 10 SLPM
N/A 200 PSIGI/O: 0-5 Vdc, 0-10 Vdc, 4-20 mAdc


LIQUID MFMs

ModelAccuracyFlow RangeMax PressureI/O
D2000iM
Model D2000iM
More Info
+/- 1% / Reading (5%-100% Full Scale)
13 mL/min IPA
125 PSIGI/O: 1-5 Vdc


ACCESSORIES

ModelAccuracyFlow RangePressure RangeMax PressureI/O
CM-400 Series
Model CM-400 Series
More Info
N/A
N/A
N/A N/AI/O: N/A


OBSOLETE PRODUCTS

ModelMax Flow (SLPM)Max Pressure (PSIG)Min Delta (PSIG)
3610
Model 3610
More Info
3611 meter: 10 SLPM
3612 meter: 100 SLPM
1500 PSIG N/A


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