P2000i Series

Fast, precise control of low liquid flow in a compact (2.6"x 5.2") package.

Clean room assembly. All metal seal construction for high purity and leak integrity.

Exclusive control circuitry combined with a piezo-electric-actuated control valve provides fast (2-second response time) and stable control at low flow rates. A unique thermal measurement system yields accurate measurement with less than a 5°C increase in fluid temperature. Full scale accuracy, including linearity, is +/- 1%.

D2000i Series

Fast, precise control of liquid precursors in semiconductor manufacturing processes.
Less than 1 second response time. Digital control circuitry and a piezo-electric-actuated control valve help contribute to this quick response. In addition, a unique laminar bypass and sensor assembly provide +/-1% of reading accuracy with only a 5°C rise in fluid temperature. All metal seal construction and clean room assembly assure high purity and leak integrity. Compact size (2.60"x 5.20") simplifies system integration.